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Patterson Research Group

Home of Plas-ma Hall

and the Vacuum Lab

(that doesn't suck)

PRG Interests

Plamsa Processing

  • Physical Vapor Deposition (PVD)

  • Plasma Enhanced Chemical Vapor Deposition (PECVD)

  • Plasma Etching

  • Magnetron Sputtering

  • Ion and Electron Energy Distributions

  • Plasma Diagnostics (Langmuir and emissive probes)

  • Feedback Control, Voltage Waveforms

Materials Characterization

  • Optical, Electron, and Probe Microscopies

  • Hardness and Tensile Testing

 

Nanomaterials

  • Nanocluster Materials Properties

  • Nanomagnetism

  • Magnetic Filtration

Materials Manufacturing

  • Controlled Environments (Cleanrooms)

  • Semiconductor and Printed Circuit Board Manufacturing

  • Vacuum Technology

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